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Analog Devices’ ADXL50 iMEMS® accelerometer, introduced in 1991 and in volume production by 1993 for auto airbag applications, distinguished itself as the first commercially available MEMS device to employ surface micromachining. Other firsts of this truly breakthrough device include:
  • The first surface micromachined accelerometer to be manufactured in high volume
  • The first micromachined sensor with the motion sensor element, extensive signal conditioning circuitry and self-test circuitry on a single chip
  • The first micromachined sensor IC whose moving part moves in the plane of the chip
  • The first surface micromachined sensor
  • The first micromachined accelerometer sensor of its size

For the automotive industry, the $5 ADXL50 was revolutionary. It contributed to the monumental cost reductions in airbag system electronics from several hundred dollars to $30. Its combination of high performance, reliability, small size and low price made record-breaking waves in the industry with “single point sensing” in a low-cost, highly reliable airbag system. Today, ADI’s core iMEMS technology has been adopted by numerous applications that are enabled by a growing family of inertial MEMS sensors that include low-g and high-g accelerometers as well as gyroscopes

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